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home > Motorized Stage > Align Stage(Detail)
SPECIFICATION |
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Table Dimension(mm) | 500X500 | Parallelism(mm) | 0.05 |
Travel Range(mm) (X/Y/Θ direction) | ±10 / ±10 / ±2.5º | Running parallelism(mm) | 0.03 |
Travel Guide | B/S Φ14 Lead 2mm Cross Roller Guide | Load Capacity(kg) | 80 |
Resolution(mm) | 0.004/Pulse(Full Step) | Material | Aluminum |
Max Speed | 20mm /sec(5kHz) | Weight(kg) | 50 |
Ball Screw Grade | C5(C7) | Motor Model | PK-545-NBW (5P STEP Motor) |
Accuracy(㎛) | 7(12) | Drive Model | CRD5107PB |
Uni-Repeatability(㎛) | ±0.5(±2) | Sensor | 1 Home Sensor, 2 Limit Sensor |
Bi-Repeatability(㎛) | ±1.5(±5) | Connector Spec. | HR-10A-10J-12P(Male)(HRS) |
Annotation 1 : The amount of rotation is only satisfied at the center position of the stage. It is not satisfied when rotating after
linear movement
Annotation 2 : Ballscrew grade is choosable. C5 precise specification is within parentheses
