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CAA-175-3S

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
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CAA-200-3S

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
9 Á¦Ç°À̹ÌÁö

CAA-175-1S

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
8 Á¦Ç°À̹ÌÁö

CAA4-175

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. 4 axes with 4 motors
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
7 Á¦Ç°À̹ÌÁö

CAAR-175

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
6 Á¦Ç°À̹ÌÁö

CAA-200-1S

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
5 Á¦Ç°À̹ÌÁö

CAA4-200

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
4 Á¦Ç°À̹ÌÁö

CAAR-200

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
3 Á¦Ç°À̹ÌÁö

CAA-300

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
2 Á¦Ç°À̹ÌÁö

CAA4-300

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm
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CAAR-300

Compact Alignment Stage Specification

1. Alignment drive of X, Y, ¥È axis combination
2. Compact Size
3. High-precision implementation of 3D Encoder option
4. Provide total integrated system by using S / W and driver controller applying self-precision compensation control algorithm